四轴平台ACT The Anti Curtaining Table
The Anti Curtaining Table (ACT) is a new stage based on our popular Eucentric 5-Axis Table (E5AT). By removing one of the five axes, we were able to shrink the ACT in such a manner that it is possible to tilt it to FIB angle. The stage allows 'rocking' a sample along an axis that is perpendicular to the beam emitted by the FIB. This rocking motion can be used to minimize or even eliminate so-called curtaining effects that result from non-uniform milling rates in certain materials or material combinations.